Details

Autor(en) / Beteiligte

• Bhattacharyya, D.
• Sahoo, N.K.
• Thakur, S.
• Das, N.C.

Titel

Spectroscopic ellipsometry of multilayer dielectric coatings

Ist Teil von

• Vacuum, 2001-03, Vol.60 (4), p.419-424

Ort / Verlag

Oxford: Elsevier Ltd

Erscheinungsjahr

2001

Link zum Volltext

Quelle

Elsevier Journal Backfiles on ScienceDirect (DFG Nationallizenzen)

Beschreibungen/Notizen

• Multilayer dielectric coatings deposited by e-beam evaporation have been characterised by the phase modulated spectroscopic ellipsometer (PMSE). Measurements have been done on various multilayer thin films devices e.g., high reflectivity mirror, narrow band filter, beam combiner, beam splitter, etc. consisting of several bilayers of TiO 2/SiO 2. Results have been shown here for the first two samples. The measured Ellipsometry spectra are fitted with theoretical spectra generated assuming appropriate models regarding the sample structures. Optical constants of the substrates and the SiO 2 films have been supplied and trial dispersion relations have been used for the optical constants of the TiO 2 layers. The fittings have been done by minimising the squared difference ( χ 2) between the measured and calculated values of the ellipsometric parameters ( ψ and Δ) and accurate information have been derived regarding the thickness and refractive indices of the different layers.