Details

Autor(en) / Beteiligte

• Sharma, Ashish Kumar
• Gupta, Navneet

Titel

Electromagnetic modeling and parameter extraction of RF-MEMS switch

Ist Teil von

• Microsystem technologies : sensors, actuators, systems integration, 2015-01, Vol.21 (1), p.181-185

Ort / Verlag

Berlin/Heidelberg: Springer Berlin Heidelberg

Erscheinungsjahr

2015

Link zum Volltext

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• The electromagnetic model of RF-MEMS switch is used to accurately determine the electrical parameters (resistance, inductance and capacitance of MEMS bridge) from S-parameter measurement. It is observed that non-uniform serpentine spring based inductively tuned switch exhibit isolation of more than 30 dB for multiple resonant frequencies ranging from Ka band to Ku band. Comparison between computed and simulated results shows the close agreement which gives the validity of proposed study.