Details

Autor(en) / Beteiligte

• YAMAMOTO, K.
• SHIMONO, T.
• OKADA, T.
• KAWAZAWA, Y.
• TATSUNO, T.

Titel

ChemInform Abstract: New Method of Purification of HF Chemicals for Very Large Scale Integration (VLSI) Manufacturing

Ist Teil von

• ChemInform, 1997-04, Vol.28 (14), p.no-no

Ort / Verlag

Weinheim: WILEY-VCH Verlag

Erscheinungsjahr

1997

Quelle

Wiley-Blackwell Journals

Beschreibungen/Notizen

• ChemInform is a weekly ing Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform of an article which was published elsewhere, please select a “Full Text” option. The original article is trackable via the “References” option.